Atom probe tomography quantification of carbon in silicon - Archive ouverte HAL Access content directly
Journal Articles Ultramicroscopy Year : 2021

Atom probe tomography quantification of carbon in silicon

P. Dumas
S. Duguay
J. Borrel
F. Hilario
D. Blavette
  • Function : Author

Dates and versions

hal-03468007 , version 1 (06-12-2021)

Identifiers

Cite

P. Dumas, S. Duguay, J. Borrel, F. Hilario, D. Blavette. Atom probe tomography quantification of carbon in silicon. Ultramicroscopy, 2021, 220, pp.113153. ⟨10.1016/j.ultramic.2020.113153⟩. ⟨hal-03468007⟩

Collections

COMUE-NORMANDIE
9 View
0 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More