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Atom probe tomography quantification of carbon in silicon

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https://hal-normandie-univ.archives-ouvertes.fr/hal-03468007
Contributor : Didier Blavette Connect in order to contact the contributor
Submitted on : Monday, December 6, 2021 - 6:55:51 PM
Last modification on : Monday, December 6, 2021 - 6:55:52 PM

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P. Dumas, S. Duguay, J. Borrel, F. Hilario, D. Blavette. Atom probe tomography quantification of carbon in silicon. Ultramicroscopy, Elsevier, 2021, 220, pp.113153. ⟨10.1016/j.ultramic.2020.113153⟩. ⟨hal-03468007⟩

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