Atom probe tomography quantification of carbon in silicon

P. Dumas; S. Duguay; J. Borrel; F. Hilario; D. Blavette

doi:10.1016/j.ultramic.2020.113153

Journal articles

Atom probe tomography quantification of carbon in silicon

P. Dumas ¹ S. Duguay J. Borrel F. Hilario D. Blavette

1 ST Microlectronics

Document type :

Journal articles

Domain :

Physics [physics]

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https://hal-normandie-univ.archives-ouvertes.fr/hal-03468007
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Submitted on : Monday, December 6, 2021 - 6:55:51 PM
Last modification on : Monday, December 6, 2021 - 6:55:52 PM

Atom probe tomography quantification of carbon in silicon

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Atom probe tomography quantification of carbon in silicon

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