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An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions

P. Salou 1 Henning Lebius 1 A. Benyagoub 1 T. Langlinay 1 D. Lelièvre 1 B. Ban-D’etat 1
1 MADIR - Matériaux, Défauts et IRradiations
CIMAP - UMR 6252 - Centre de recherche sur les Ions, les MAtériaux et la Photonique
Abstract : An innovative experimental equipment allowing to study the sputtering induced by ion beam irradiation is presented. The sputtered particles are collected on a catcher which is analyzed in situ by Auger electron spectroscopy without breaking the ultra high vacuum (less than 10−9 mbar), avoiding thus any problem linked to possible contamination. This method allows to measure the angular distribution of sputtering yield. It is now possible to study the sputtering of many elements such as carbon based materials. Preliminary results are presented in the case of highly oriented pyrolytic graphite and tungsten irradiated by an Ar+ beam at 2.8 keV and 7 keV, respectively.
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Submitted on : Tuesday, April 20, 2021 - 7:11:31 AM
Last modification on : Tuesday, October 19, 2021 - 11:34:58 PM

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P. Salou, Henning Lebius, A. Benyagoub, T. Langlinay, D. Lelièvre, et al.. An innovative experimental setup for the measurement of sputtering yield induced by keV energy ions. Review of Scientific Instruments, American Institute of Physics, 2013, 84 (9), pp.095115. ⟨10.1063/1.4821973⟩. ⟨hal-03202508⟩

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