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Formules analytiques pour le calcul du profil d'ions implantés

Abstract : The first two moments m1 and m2 (or σ) describing the profile of ions implanted into a target material at low energies can now be estimated with the help of simple analytical formulae. In this paper, we propose for m1 an expression which only uses the exponential integral function ; moreover it appears to be valid for two different interatomic potentials. Concerning the estimation of σ, we suggest two possibilities of unequal difficulty ; first one is an expression in which m2 appears as a quadratic trinomial ; the second one, which is more simple, uses the proportionality existing between m1 and σ.
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J.P. Eymery, A. Fnidiki. Formules analytiques pour le calcul du profil d'ions implantés. Revue de Physique Appliquée, Société française de physique / EDP, 1988, 23 (5), pp.925-932. ⟨10.1051/rphysap:01988002305092500⟩. ⟨hal-03144696⟩



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