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Electro-thermal and optical characterization of an uncooled suspended bolometer based on an epitaxial La 0.7 Sr 0.3 MnO 3 film grown on CaTiO 3 /Si

Vanuza Marques Do Nascimento 1 Laurence Méchin Shuang Liu 1 Ammar Aryan 1 Carolina Adamo 2 Darrell G. Schlom 2 Bruno Guillet 1
1 Equipe Electronique - Laboratoire GREYC - UMR6072
GREYC - Groupe de Recherche en Informatique, Image, Automatique et Instrumentation de Caen
Abstract : The electro-thermal and optical properties of a bolometer based on an La 0.7 Sr 0.3 MnO 3 (LSMO) thin film with a detection area of 100 × 100 µm 2 are presented. The LSMO thin film was epitaxially grown on CaTiO 3 /Si and patterned using a two-step etching process of ion-beam etching in argon and of reactive-ion etching in SF 6 , in order to etch LSMO/CaTiO 3 and Si, respectively. The voltage-current (V-I) characteristics of the bolometer were measured in vacuum from 240 K to 415 K. From the V-I characteristics and a thermal model of the bolometer, the electrical responsivity was determined and compared to the optical responsivity measured with a laser diode at 635 nm. The noise equivalent power (NEP) as a function of frequency was measured by dividing the spectral noise power density by the optical responsivity. At 300 K and a bias current of 80 µA, the NEP was 2.3 × 10 −11 W • Hz −1/2 in the 20-200 Hz modulation frequency range and the response time was 1.3 ms. The obtained NEP value without any absorbing layer or antennas, combined with the low value of the response time, are a very promising step towards the use of such LSMO-based bolometers for IR or THz detection.
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https://hal-normandie-univ.archives-ouvertes.fr/hal-03070710
Contributor : Laurence Méchin <>
Submitted on : Thursday, December 17, 2020 - 11:41:21 PM
Last modification on : Monday, January 4, 2021 - 3:46:09 PM

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Vanuza Marques Do Nascimento, Laurence Méchin, Shuang Liu, Ammar Aryan, Carolina Adamo, et al.. Electro-thermal and optical characterization of an uncooled suspended bolometer based on an epitaxial La 0.7 Sr 0.3 MnO 3 film grown on CaTiO 3 /Si. Journal of Physics D: Applied Physics, IOP Publishing, 2021, 54 (5), pp.055301. ⟨10.1088/1361-6463/abbfca⟩. ⟨hal-03070710⟩

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