Study of the impact of dielectric aging on coplanar waveguide performance

A.P. Nguyen (1) , U. Lüders (1) , F. Voiron (2)

1 CRISMAT - Laboratoire de cristallographie et sciences des matériaux
2 IPDiA

In this paper, we study the impact of electrical and thermal stress on line loss and characteristic impedance of a CoPlanar Waveguides (CPWs). The de-rating of the line propagation constants and impedance characteristic are analyzed and discussed with respect to the stress level applied to the dielectric. The physical mechanisms leading to dielectric properties variation is explained. © 2015 IEEE.

Mots clés: Characteristic impedance; Line loss; Mobile ions; Stress; Coplanar waveguides; Dielectrics; Silicon; Impedance; Substrates; Temperature measurement; Ageing; Dielectrics materials; Thermal stresses; Dielectric stress; Coplanar waveguide (CPW); Charges

Domaines: Chimie; Cristallographie; Chimie théorique et/ou physique; Matériaux

A.P. Nguyen, U. Lüders, F. Voiron. Study of the impact of dielectric aging on coplanar waveguide performance. 2015 IEEE International Integrated Reliability Workshop (IIRW), Oct 2015, South Lake Tahoe, United States. pp.103-106, ⟨10.1109/IIRW.2015.7437078⟩. ⟨hal-02184739⟩