Study of the impact of h+ mobile ions on RF performances of PECVD TEOS silicon dioxide deposited at low temperature

A.P. Nguyen; U. Lüders; F. Voiron

Study of the impact of h+ mobile ions on RF performances of PECVD TEOS silicon dioxide deposited at low temperature

A.P. Nguyen ¹ U. Lüders ¹ F. Voiron ²

1 CRISMAT - Laboratoire de cristallographie et sciences des matériaux

2 IPDiA

Abstract : In this paper, we study the impact of H+ mobile ions on Radio Frequency (RF) performances of silicon dioxide deposited by Plasma Enhanced ChemicalVapor Deposition (PECVD) at lowtemperature (200°C), using a tetraethylorthosilicate (TEOS)-oxygenmixture as gas precursor. The presence of H+ ions within the dielectric is related to the low temperature deposition of the dielectric combined with exposition to moisture; the phenomenon is proven with Fourier Transform Infrared Spectroscopy (FTIR) and electrical methods as Transient Voltage Sweep (TVS) and C-V (capacitance-voltage) experiments on MOS (Metal Oxide Semiconductor) capacitors. A CoPlanarWaveguide (CPW) structure is employed to evaluate the RF behavior of the dielectric. It will be shown that the variation of CPW characteristics such as line loss (α) and characteristic impedance (Zc) is due to the interaction between the H+ ions and the substrate. © 2016 The Electrochemical Society.

Keywords : Capacitance Deposition Fourier transform infrared spectroscopy Ionic conduction Ions Low-k dielectric Metals MOS devices Oxide semiconductors Silica Capacitance voltage Characteristic impedance Electrical methods Low-temperature deposition Metal oxide semiconductor Radio frequencies Tetraethyl orthosilicates Transient voltage Temperature

Type de document :

Article dans une revue

Domaine :

Chimie

Chimie / Cristallographie

Chimie / Chimie théorique et/ou physique

Chimie / Matériaux

Liste complète des métadonnées

https://hal-normandie-univ.archives-ouvertes.fr/hal-02184710
Contributeur : Université Normandie <>
Soumis le : mardi 16 juillet 2019 - 11:29:55
Dernière modification le : mercredi 14 août 2019 - 17:16:01

Study of the impact of h+ mobile ions on RF performances of PECVD TEOS silicon dioxide deposited at low temperature

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Study of the impact of h+ mobile ions on RF performances of PECVD TEOS silicon dioxide deposited at low temperature

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