Pulse shaping optimization for improving atom probe tomography

Abstract : We propose in this paper novel approach for improving mass resolution in atom probe tomography. Using conventional counter-electrode or microelectrode design, improved mass resolution at half, tenth and 1% of the mass peak maximum is predicted when shaping properly the voltage evaporation pulse. Using a numerical approach, it is shown that a flat top voltage pulse used to trigger the field evaporation with sharp front and leading edges associated with a short tip to counter electrode distance(≈10 μm) strongly minimizes the energy deficits of evaporated ions from the sample, so that energy compensation devices are not necessary to obtain high mass resolution.
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https://hal-normandie-univ.archives-ouvertes.fr/hal-02177749
Contributeur : Etienne Talbot <>
Soumis le : mardi 9 juillet 2019 - 12:35:48
Dernière modification le : mardi 23 juillet 2019 - 15:23:59

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L. Zhao, Antoine Normand, F. Delaroche, B. Ravelo, F. Vurpillot. Pulse shaping optimization for improving atom probe tomography. International Journal of Mass Spectrometry, Elsevier, 2015, 386, pp.47-53. ⟨10.1016/j.ijms.2015.06.012⟩. ⟨hal-02177749⟩

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