Low frequency noise analysis on Si/SiGe superlattice I/O n-channel FinFETs

D. Boudier (1) , B Cretu (1) , E. Simoen (2) , G. Hellings (2) , T. Schram (2) , H. Mertens (2) , D. Linten (2)

1 Equipe Electronique - Laboratoire GREYC - UMR6072
2 IMEC - IMEC

Domaines: Micro et nanotechnologies/Microélectronique

D. Boudier, B Cretu, E. Simoen, G. Hellings, T. Schram, et al.. Low frequency noise analysis on Si/SiGe superlattice I/O n-channel FinFETs. Solid-State Electronics, 2019, pp.107732. ⟨10.1016/j.sse.2019.107732⟩. ⟨hal-02438740⟩